Theory of sputter yield fluctuations and calculation of the...

Physical Review B 1995 / 12 Vol. 52; Iss. 23

Theory of sputter yield fluctuations and calculation of the variance

Pázsit, I., Prinja, A. K.
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Volume:
52
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.52.16877
Date:
December, 1995
File:
PDF, 241 KB
english, 1995
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