Measurement of desorbed products during organic polymer...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2006 Vol. 24; Iss. 6

Measurement of desorbed products during organic polymer thin film etching by plasma beam irradiation

Kurihara, Kazuaki, Karahashi, Kazuhiro, Egami, Akihiro, Nakamura, Moritaka
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2364000
File:
PDF, 391 KB
english, 2006
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