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[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Bistable microvalve with pneumatically coupled membranes

Wagner, B., Quenzer, H.J., Hoerschelmann, S., Lisec, T., Juerss, M.
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Year:
1996
Language:
english
DOI:
10.1109/memsys.1996.494012
File:
PDF, 696 KB
english, 1996
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