In-Situ Development of a Silicon Nitride/Amorphous Silicon...

Materials and Manufacturing Processes 1996 / 11 Vol. 11; Iss. 6

In-Situ Development of a Silicon Nitride/Amorphous Silicon Oxy nitride Nano-Composite Microstructure

Patel, Parimal J., Gilde, Gary A., Sengupta, Louise, Livi, Kenneth T.
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Volume:
11
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426919608947546
Date:
November, 1996
File:
PDF, 330 KB
english, 1996
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