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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Sliding Contact Micro-Bearing for Nano-Precision Sensing and Positioning
Ramakrishnan, Narayanan, Johns, Earl C., Zhao, Yongjun, Kiely, James D., Bedillion, Mark D., Chu, Patrick B.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300476
File:
PDF, 267 KB
english, 2007