![](/img/cover-not-exists.png)
[IEEE 2008 6th IEEE International Conference on Industrial Informatics (INDIN) - Daejeon, South Korea (2008.07.13-2008.07.16)] 2008 6th IEEE International Conference on Industrial Informatics - Nano-level 3-D measurement system using 3-wavelength laser light interference
Seiji Hata,, Junichiro Hayashi,, Ichiro Ishimaru,, Shigeaki Morimoto,Year:
2008
Language:
english
DOI:
10.1109/indin.2008.4618196
File:
PDF, 905 KB
english, 2008