[IEEE 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Hose, CA, USA (2014.5.20-2014.5.23)] IEEE International Interconnect Technology Conference - Highly compressed nano-layers in epitaxial silicon carbide membranes for MEMs sensors
Brock, Ryan E., Iacopi, Francesca, Iacopi, Alan, Hold, Leonie, Dauskardt, Reinhold H.Year:
2014
Language:
english
DOI:
10.1109/iitc.2014.6831885
File:
PDF, 542 KB
english, 2014