[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step
Gylfason, K.B., Antelius, M., Sohlstrom, H.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969732
File:
PDF, 812 KB
english, 2011