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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A New Fabrication Method for 3D Multilayer Microstructure
Jing, Xiangmeng, Di Chen,, Zhang, Baozeng, Liu, Jingquan, Zhu, JunYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334846
File:
PDF, 3.88 MB
english, 2006