Study on the oxidation and reduction of tungsten surface...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 6

Study on the oxidation and reduction of tungsten surface for sub-50 nm patterning process

Kim, Jong Kyu, Nam, Seok Woo, Cho, Sung Il, Jhon, Myung S., Min, Kyung Suk, Kim, Chan Kyu, Jung, Ho Bum, Yeom, Geun Young
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4758790
File:
PDF, 1.47 MB
english, 2012
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