[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite
Suzuki, Junya, Miura, Takuya, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Namazu, Takahiro, Oohira, Fumikazu, Suzuki, TakaakiYear:
2013
Language:
english
DOI:
10.1109/omn.2013.6659079
File:
PDF, 290 KB
english, 2013