Linear Plasma Sources for Large Area Film Deposition: A...

Plasma Science and Technology 2014 / 04 Vol. 16; Iss. 4

Linear Plasma Sources for Large Area Film Deposition: A Brief Review

Wei, Yu, Zuo, Xiao, Chen, Longwei, Meng, Yuedong, Fang, Shidong, Shen, Jie, Shu, Xingsheng
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Volume:
16
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/16/4/10
Date:
April, 2014
File:
PDF, 1.09 MB
english, 2014
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