Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition
Diaz, Jose Mario A., Kambara, Makoto, Yoshida, ToyonobuVolume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2956692
File:
PDF, 723 KB
english, 2008