A quasi-direct-current sputtering technique for the...

A quasi-direct-current sputtering technique for the deposition of dielectrics at enhanced rates

Este, G.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575266
Date:
May, 1988
File:
PDF, 536 KB
english, 1988
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