Thermodynamic and Experimental Analysis of Chemical Vapor Deposition of Alumina from AlCl[sub 3]-H[sub 2]-CO[sub 2] Gas Phase Mixtures
Colmet, R.Volume:
129
Year:
1982
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2124152
File:
PDF, 1.06 MB
english, 1982