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Reactions of atomic nitrogen and trimethyl aluminum downstream from a nitrogen microwave plasma
Meikle, Scott, Nomura, Hideaki, Nakanishi, Yoichiro, Hatanaka, YoshinoriVolume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345229
File:
PDF, 707 KB
english, 1990