X-ray topographs of silicon crystals with superposed oxide...

X-ray topographs of silicon crystals with superposed oxide film. A theoretical study by means of simulations

Epelboin, Y.
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Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341452
File:
PDF, 747 KB
english, 1988
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