[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Kiihamaki, J., Ronkainen, H., Pekko, P., Kattelus, H., Theqvist, K.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1217098

File:

PDF, 248 KB

english, 2003

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