Investigation of Ta film growth mechanisms and atomic...

Applied Physics Letters 2006 Vol. 88; Iss. 11

Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

Yang, Shuo-Wang, Dai, Ling, Chen, Xian-Tong, Wu, Ping, Tan, V. B. C.
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Volume:
88
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2186511
File:
PDF, 604 KB
english, 2006
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