Laser chemical vapor deposition of selected area Fe and W...

Laser chemical vapor deposition of selected area Fe and W films

Allen, S. D., Tringubo, A. B.
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Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332154
File:
PDF, 448 KB
english, 1983
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