Formation of carbon nitride films with high N/C ratio by high-pressure radio frequency magnetron sputtering
Okada, T., Yamada, S., Takeuchi, Y., Wada, TVolume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360397
File:
PDF, 524 KB
english, 1995