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[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Applications of rapid thermal process to nitridation of tungsten and denudation of WN/sub x/ for poly-Si/Metal gates
Yao Zhi Hu,, Sing-Pin Tay,Year:
2002
Language:
english
DOI:
10.1109/rtp.2002.1039450
File:
PDF, 319 KB
english, 2002