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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications
Sun, Xuming, Yuan, Quan, Fang, Dongming, Zhang, HaixiaYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969531
File:
PDF, 1.24 MB
english, 2011