Defect formation in H implantation of crystalline Si

Physical Review B 1988 / 5 Vol. 37; Iss. 14

Defect formation in H implantation of crystalline Si

Keinonen, J., Hautala, M., Rauhala, E., Karttunen, V., Kuronen, A., Räisänen, J., Lahtinen, J., Vehanen, A., Punkka, E., Hautojärvi, P.
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Volume:
37
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.37.8269
Date:
May, 1988
File:
PDF, 1020 KB
english, 1988
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