A Novel Membrane Process for RF MEMS Switches

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

A Novel Membrane Process for RF MEMS Switches

Ming-Jer Lee,, Yang Zhang,, Changwon Jung,, Bachman, Mark, De Flaviis, Franco, Li, G P
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2046138
Date:
June, 2010
File:
PDF, 540 KB
english, 2010
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