Infrared spectroscopic study of dimethylaluminum-hydride...

Infrared spectroscopic study of dimethylaluminum-hydride adsorption on oxidized, hydrogen-terminated, and reconstructed Si surfaces

Wadayama, T., Takeuchi, K., Mukai, K., Tanabe, T., Hatta, A.
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1434966
File:
PDF, 388 KB
english, 2002
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