Infrared spectroscopic study of dimethylaluminum-hydride adsorption on oxidized, hydrogen-terminated, and reconstructed Si surfaces
Wadayama, T., Takeuchi, K., Mukai, K., Tanabe, T., Hatta, A.Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1434966
File:
PDF, 388 KB
english, 2002