An Integrated Electrostatic Peristaltic 18-Stage Gas...

Journal of Microelectromechanical Systems 2015 / 2 Vol. 24; Iss. 1

An Integrated Electrostatic Peristaltic 18-Stage Gas Micropump With Active Microvalves

Kim, Hanseup, Astle, Aaron A., Najafi, Khalil, Bernal, Luis P., Washabaugh, Peter D.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2327096
Date:
February, 2015
File:
PDF, 4.70 MB
english, 2015
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