Structural reordering and electrical activation of ion-implanted GaAs and InP due to laser annealing in a controlled atmosphere
Vitali, G., Pizzuto, C., Zollo, G., Karpuzov, D., Kalitzova, M., van der Heide, P., Scamarcio, G., Spagnolo, V., Chiavarone, L., Manno, D.Volume:
59
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.59.2986
Date:
January, 1999
File:
PDF, 580 KB
english, 1999