Ion flux and ion power losses at the electrode sheaths in a...

Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.
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Volume:
69
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.348530
File:
PDF, 868 KB
english, 1991
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