Pressure control of properties of pulsed laser deposited...

Pressure control of properties of pulsed laser deposited carbon and carbon nitride films

Szörényi, Tamás, Fogarassy, Eric
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1589171
File:
PDF, 281 KB
english, 2003
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