[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Fabrication of cnfets with low-resistance electrical contacts
Liu, W., Chikkadi, K., Lee, S. W., Hierold, C., Haluska, M.Année:
2013
Langue:
english
DOI:
10.1109/transducers.2013.6627191
Fichier:
PDF, 782 KB
english, 2013