[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Radio-frequency and DC electrical characterization on a modular MEMS mechanical test platform for nanomaterials
Brown, J. J., Wallis, T. M., Kabos, P., Bertness, K. A., Sanford, N., Bright, V. M.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626925
File:
PDF, 1.84 MB
english, 2013