Research on dynamical-gradual greyscale digital mask lithography
Gao, Yiqing, He, Shuai, Luo, Ningning, Rao, YufangVolume:
58
Language:
english
Journal:
Journal of Modern Optics
DOI:
10.1080/09500340.2011.553293
Date:
April, 2011
File:
PDF, 1.45 MB
english, 2011