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[IEEE CLEO '97., Summaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD (May 18-23, 1997)] CLEO '97., Summaries of Papers Presented at the Conference on Lasers and Electro-Optics - High-average-power, high-repetition-rate, injection-seeded 213 nm generation for optical microlithography
Kubota, S., Masuda, H., Kikuchi, H., Oka, M., Alexander, J.Volume:
11
Year:
1997
Language:
english
DOI:
10.1109/cleo.1997.603520
File:
PDF, 318 KB
english, 1997