Long-range ordered aluminum oxide nanotubes by...

Long-range ordered aluminum oxide nanotubes by nanoimprint-assisted aluminum film surface engineering

Noh, Kunbae, Choi, Chulmin, Kim, Jin-Yeol, Oh, Young, Brammer, Karla S., Loya, Mariana C., Jin, Sungho
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3498759
File:
PDF, 783 KB
english, 2010
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