Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Long-range ordered aluminum oxide nanotubes by nanoimprint-assisted aluminum film surface engineering
Noh, Kunbae, Choi, Chulmin, Kim, Jin-Yeol, Oh, Young, Brammer, Karla S., Loya, Mariana C., Jin, SunghoVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3498759
File:
PDF, 783 KB
english, 2010