Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1989 / 7 Vol. 7; Iss. 4
Initial stages of GaAs and AlAs growth on Si substrates: Atomic-layer epitaxy
Kitahara, K.Volume:
7
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584628
Date:
July, 1989
File:
PDF, 1.08 MB
english, 1989