Solute trapping of group III, IV, and V elements in silicon...

Journal of Applied Physics 1994 Vol. 76; Iss. 3

Solute trapping of group III, IV, and V elements in silicon by an aperiodic stepwise growth mechanism

Reitano, Riccardo, Smith, Patrick M., Aziz, Michael J.
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Volume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357728
File:
PDF, 1.69 MB
english, 1994
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