Transition metal nitride formed by simultaneous physisorption and thermal evaporation; TiN/Si(100)
Ahn, S.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581285
Date:
May, 1998
File:
PDF, 363 KB
english, 1998