[IEEE 2000 Symposium on VLSI Technology. Digest of Technical Papers - Honolulu, HI, USA (13-15 June 2000)] 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104) - A high performance drying method enabling clustered single wafer wet cleaning
Mertens, P.W., Doumen, G., Lauerhaas, J., Kenis, K., Fyen, W., Meuris, M., Arnauts, S., Devriendt, K., Vos, R., Heyns, M.Year:
2000
Language:
english
DOI:
10.1109/vlsit.2000.852768
File:
PDF, 244 KB
english, 2000