![](/img/cover-not-exists.png)
Accurate infrared spectroscopy determination of interstitial and precipitated oxygen in highly doped Czochralski-grown silicon
De Gryse, O., Clauws, P., Rossou, L., Van Landuyt, J., Vanhellemont, J.Volume:
70
Year:
1999
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1149974
File:
PDF, 322 KB
english, 1999