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Dislocation structure in AlN films induced by in situ transmission electron microscope nanoindentation
Tokumoto, Yuki, Kutsukake, Kentaro, Ohno, Yutaka, Yonenaga, IchiroVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4764928
File:
PDF, 1.64 MB
english, 2012