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Quantitative analysis of sputter processes in a small magnetron system
Knittel, Ivo, Gothe, Marc, Hartmann, UweVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2091197
File:
PDF, 503 KB
english, 2005