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3.2: Invited Paper : Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions
Goto, Tetsuya, Sugawa, Shigetoshi, Ohmi, TadahiroVolume:
45
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/j.2168-0159.2014.tb00002.x
Date:
June, 2014
File:
PDF, 503 KB
english, 2014