Correlation of surface chemistry of GaAs substrates with growth mode and stacking fault density in ZnSe epilayers
Hong, Soon-Ku, Chang, Ji-Ho, Hanada, Takashi, Kurtz, Elisabeth, Oku, Masaoki, Yao, TakafumiVolume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1513645
File:
PDF, 607 KB
english, 2002