Current conduction of 0.72 nm equivalent-oxide-thickness...

Current conduction of 0.72 nm equivalent-oxide-thickness LaO/HfO[sub 2] stacked gate dielectrics

Liu, Chuan-Hsi, Chen, Hung-Wen, Chen, Shung-Yuan, Huang, Heng-Sheng, Cheng, Li-Wei
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Volume:
95
Year:
2009
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3170235
File:
PDF, 551 KB
english, 2009
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