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Investigating the plasma parameters of an Ar/O2 discharge during the sputtering of Al targets in an inverted cylindrical magnetron
Mensah, Samuel L., Gordon, Matt, Naseem, Hameed H.Volume:
21
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4896062
Date:
September, 2014
File:
PDF, 1.47 MB
english, 2014