A heterodyne interferometer for angle metrology

Review of Scientific Instruments 2010 Vol. 81; Iss. 4

A heterodyne interferometer for angle metrology

Hahn, Inseob, Weilert, M., Wang, X., Goullioud, R.
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3374550
File:
PDF, 442 KB
english, 2010
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