Hybrid-phase growth in microcrystalline silicon thin films...

Hybrid-phase growth in microcrystalline silicon thin films deposited by plasma enhanced chemical vapor deposition at low temperatures

Sugano, T., Kitagawa, T., Sobajima, Y., Toyama, T., Okamoto, H.
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1883720
File:
PDF, 451 KB
english, 2005
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