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Oxygen precipitation heterogeneously nucleating on silicon phosphide precipitates in heavily phosphorus-doped Czochralski silicon
Zeng, Yuheng, Ma, Xiangyang, Tian, Daxi, Wang, Weiyan, Gong, Longfei, Yang, Deren, Que, DuanlinVolume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3120943
File:
PDF, 712 KB
english, 2009