Comparative study on the nonperiodic and periodic gratings...

Comparative study on the nonperiodic and periodic gratings for scanning probe microscopy drift measurements

Niu, Dun, Li, Jiawen, Chen, Yuhang, Huang, Wenhao
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3478305
File:
PDF, 626 KB
english, 2010
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